真空爐的真空系統(tong)的三(san)個基本要求：

　　1)能迅速地(di)將真(zhen)(zhen)空熱處理(li)爐(lu)(lu)的(de)真(zhen)(zhen)空度抽到規定(ding)的(de)要(yao)求。 2)能及時排出(chu)被處理(li)工件和爐(lu)(lu)內構件所(suo)釋放(fang)出(chu)的(de)各種氣體(ti)(ti)，以及因真(zhen)(zhen)空泄漏而滲(shen)入爐(lu)(lu)體(ti)(ti)內的(de)氣體(ti)(ti)。 3)真(zhen)(zhen)空機組占地(di)面積小，運行(xing)安全可靠，操作簡便(bian)。

真空爐

　　真(zhen)(zhen)(zhen)(zhen)(zhen)(zhen)(zhen)(zhen)(zhen)空(kong)(kong)(kong)(kong)(kong)(kong)系(xi)(xi)統(tong)(tong)的組(zu)(zu)(zu)成(cheng)，真(zhen)(zhen)(zhen)(zhen)(zhen)(zhen)(zhen)(zhen)(zhen)空(kong)(kong)(kong)(kong)(kong)(kong)爐的真(zhen)(zhen)(zhen)(zhen)(zhen)(zhen)(zhen)(zhen)(zhen)空(kong)(kong)(kong)(kong)(kong)(kong)系(xi)(xi)統(tong)(tong)通常由真(zhen)(zhen)(zhen)(zhen)(zhen)(zhen)(zhen)(zhen)(zhen)空(kong)(kong)(kong)(kong)(kong)(kong)獲得設備(真(zhen)(zhen)(zhen)(zhen)(zhen)(zhen)(zhen)(zhen)(zhen)空(kong)(kong)(kong)(kong)(kong)(kong)泵機(ji)組(zu)(zu)(zu))、控制真(zhen)(zhen)(zhen)(zhen)(zhen)(zhen)(zhen)(zhen)(zhen)空(kong)(kong)(kong)(kong)(kong)(kong)組(zu)(zu)(zu)件(jian)和(he)測量(liang)真(zhen)(zhen)(zhen)(zhen)(zhen)(zhen)(zhen)(zhen)(zhen)空(kong)(kong)(kong)(kong)(kong)(kong)組(zu)(zu)(zu)件(jian)所組(zu)(zu)(zu)成(cheng)。 1)真(zhen)(zhen)(zhen)(zhen)(zhen)(zhen)(zhen)(zhen)(zhen)空(kong)(kong)(kong)(kong)(kong)(kong)泵機(ji)組(zu)(zu)(zu)。根據(ju)爐子(zi)工作壓(ya)力和(he)抽氣量(liang)的大(da)小，分別選配(pei)不(bu)同(tong)的低真(zhen)(zhen)(zhen)(zhen)(zhen)(zhen)(zhen)(zhen)(zhen)空(kong)(kong)(kong)(kong)(kong)(kong)泵、中(zhong)真(zhen)(zhen)(zhen)(zhen)(zhen)(zhen)(zhen)(zhen)(zhen)空(kong)(kong)(kong)(kong)(kong)(kong)泵、高(gao)真(zhen)(zhen)(zhen)(zhen)(zhen)(zhen)(zhen)(zhen)(zhen)空(kong)(kong)(kong)(kong)(kong)(kong)泵和(he)超(chao)高(gao)真(zhen)(zhen)(zhen)(zhen)(zhen)(zhen)(zhen)(zhen)(zhen)空(kong)(kong)(kong)(kong)(kong)(kong)泵。 2)真(zhen)(zhen)(zhen)(zhen)(zhen)(zhen)(zhen)(zhen)(zhen)空(kong)(kong)(kong)(kong)(kong)(kong)組(zu)(zu)(zu)件(jian)或(huo)元件(jian)。在真(zhen)(zhen)(zhen)(zhen)(zhen)(zhen)(zhen)(zhen)(zhen)空(kong)(kong)(kong)(kong)(kong)(kong)爐體和(he)真(zhen)(zhen)(zhen)(zhen)(zhen)(zhen)(zhen)(zhen)(zhen)空(kong)(kong)(kong)(kong)(kong)(kong)泵機(ji)組(zu)(zu)(zu)之間配(pei)備的各種真(zhen)(zhen)(zhen)(zhen)(zhen)(zhen)(zhen)(zhen)(zhen)空(kong)(kong)(kong)(kong)(kong)(kong)組(zu)(zu)(zu)件(jian)或(huo)真(zhen)(zhen)(zhen)(zhen)(zhen)(zhen)(zhen)(zhen)(zhen)字元件(jian)，如(ru)(ru)管路、密(mi)封圈、法蘭、波紋管、冷阱、過濾器和(he)閥門(men)等。 3)真(zhen)(zhen)(zhen)(zhen)(zhen)(zhen)(zhen)(zhen)(zhen)空(kong)(kong)(kong)(kong)(kong)(kong)測量(liang)系(xi)(xi)統(tong)(tong)，如(ru)(ru)真(zhen)(zhen)(zhen)(zhen)(zhen)(zhen)(zhen)(zhen)(zhen)空(kong)(kong)(kong)(kong)(kong)(kong)規(gui)管、真(zhen)(zhen)(zhen)(zhen)(zhen)(zhen)(zhen)(zhen)(zhen)空(kong)(kong)(kong)(kong)(kong)(kong)壓(ya)力表和(he)其他真(zhen)(zhen)(zhen)(zhen)(zhen)(zhen)(zhen)(zhen)(zhen)空(kong)(kong)(kong)(kong)(kong)(kong)測量(liang)儀表。 4)真(zhen)(zhen)(zhen)(zhen)(zhen)(zhen)(zhen)(zhen)(zhen)空(kong)(kong)(kong)(kong)(kong)(kong)檢漏(lou)儀器、真(zhen)(zhen)(zhen)(zhen)(zhen)(zhen)(zhen)(zhen)(zhen)空(kong)(kong)(kong)(kong)(kong)(kong)控制儀器、充氣裝置等。 真(zhen)(zhen)(zhen)(zhen)(zhen)(zhen)(zhen)(zhen)(zhen)空(kong)(kong)(kong)(kong)(kong)(kong)爐品種多，對真(zhen)(zhen)(zhen)(zhen)(zhen)(zhen)(zhen)(zhen)(zhen)空(kong)(kong)(kong)(kong)(kong)(kong)系(xi)(xi)統(tong)(tong)的要求(qiu)不(bu)一(yi)樣。就真(zhen)(zhen)(zhen)(zhen)(zhen)(zhen)(zhen)(zhen)(zhen)空(kong)(kong)(kong)(kong)(kong)(kong)度而言，有低真(zhen)(zhen)(zhen)(zhen)(zhen)(zhen)(zhen)(zhen)(zhen)空(kong)(kong)(kong)(kong)(kong)(kong)、中(zhong)真(zhen)(zhen)(zhen)(zhen)(zhen)(zhen)(zhen)(zhen)(zhen)空(kong)(kong)(kong)(kong)(kong)(kong)和(he)高(gao)真(zhen)(zhen)(zhen)(zhen)(zhen)(zhen)(zhen)(zhen)(zhen)空(kong)(kong)(kong)(kong)(kong)(kong)系(xi)(xi)統(tong)(tong)。

　　下(xia)面介紹幾種常用的真(zhen)空系統。

　　1.低真空(kong)系統 低真空(kong)系統適用(yong)于真空(kong)度在2～1333Pa范圍的(de)真空(kong)熱處(chu)理爐，如預抽低真空(kong)井(jing)式爐。大多以油封式旋轉機械泵(beng)為主泵(beng)。

　　2.中(zhong)(zhong)真(zhen)(zhen)(zhen)空(kong)(kong)系統(tong) 中(zhong)(zhong)真(zhen)(zhen)(zhen)空(kong)(kong)系統(tong)適用于真(zhen)(zhen)(zhen)空(kong)(kong)度在(zai)3 X10～～1.333Pa范圍的真(zhen)(zhen)(zhen)空(kong)(kong)熱處理爐。中(zhong)(zhong)真(zhen)(zhen)(zhen)空(kong)(kong)系統(tong)在(zai)真(zhen)(zhen)(zhen)空(kong)(kong)爐中(zhong)(zhong)應用最廣(guang)泛，其通常(chang)由兩(liang)級真(zhen)(zhen)(zhen)空(kong)(kong)泵(beng)(beng)機(ji)組(zu)組(zu)成(cheng)。初級泵(beng)(beng)多采用旋轉機(ji)械泵(beng)(beng)或滑閥式機(ji)械泵(beng)(beng)，主泵(beng)(beng)為機(ji)械增壓(ya)(ya)泵(beng)(beng)(羅(luo)茨泵(beng)(beng))或油增壓(ya)(ya)泵(beng)(beng)

　　3.高真空系統 高真空系統適用于真空度在6.6×10～～1.333 X 10。Pa范圍的真空爐，如真(zhen)空退火爐(lu)、真(zhen)空釬焊爐(lu)，通常由三級真(zhen)空泵(beng)機(ji)(ji)組組成(cheng)，主泵(beng)通常采(cai)用油(you)擴(kuo)散泵(beng)、離子泵(beng)，初級泵(beng)大都也是(shi)采(cai)用旋轉機(ji)(ji)械泵(beng)或滑閥式機(ji)(ji)械泵(beng)。